Surface flashover characteristics of diamond-like carbon thin films in vacuum
作者： H. Kirkici
DOI: 10.1109/94.590869
关键词:
摘要: Synthetic thin films such as diamond-like carbon (DLC) and polycrystalline diamond can be used to increase surface flashover voltage of dielectric materials in HV devices operating vacuum. This work presents experimental results identifying some characteristics space vacuum conditions. The DLC samples the experiments are produced by a microwave plasma deposition technique. electrode material was copper, dc applied between electrodes. Surface breakdown wave forms film were determined. showed that may not suitable for applications when coated onto semiconductor materials. Additionally, these compared with quartz samples.
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