Ultrasonic device, ultrasonic module, electronic apparatus, and ultrasonic measurement apparatus
作者： Kanechika Kiyose , Nobuaki Hashimoto
DOI:
关键词:
摘要: An ultrasonic device includes an element substrate, transducer array disposed on a rear surface of the and having plurality transducers arranged in array, electrode line connected to drawn terminal region located outside planar view substrate viewed from normal direction, sealing plate bonded side through penetrating thickness direction pad at position, which is opposed pad.
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