Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device
作者： Kanechika Kiyose , Hironori Suzuki , Hiroshi Matsuda
DOI:
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摘要: An ultrasonic transducer device includes a base, first electrode film, piezoelectric second film and conductive film. The base has plurality of vibrating portions arranged in an array pattern. is disposed on each the portions. connected to thickness larger than
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