Ultrasonic transducer, ultrasonic probe, and ultrasonic examination device
作者： Jiro Tsuruno , Hironori Suzuki , Tomoaki Nakamura
DOI:
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摘要: An ultrasonic transducer includes a substrate, supporting film, and piezoelectric element. The substrate an opening. film is configured on the to cover element at part of film. overlaps with opening in planar view thickness direction substrate. A center gravity smaller than outer edge portion part. closer
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