Thermomechanical modeling of an actuated micromirror
作者： J. Funk , J. Bühler , J.G. Korvink , H. Baltes
DOI: 10.1016/0924-4247(94)00976-O
关键词:
摘要: We have investigated numerically a micromirror actuated by the thermal bimorph effect. By performing coupled thermomechanical simulations with our MEMS modeling environment SOLIDIS, we optimized mirror structure respect to maximum deflection for given heating power. Numerical gives insight into response of mirror, and reveals possible technological obstacles device fabrication operation.
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sci-hub.se 参考文章(3)
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