Fundamentals of Plasma Chemistry

摘要: Up to now we have considered CVD processes in which the source of energy for forward process endothermic reactions was purely thermal. However, interactions involving charged particles produced a plasma been effectively utilized various reduce reaction temperatures. Figure 6.1 illustrates familiar diagram reaction: pathway X is one previously thermal CVD, where between reactants A and B has overcome potential hill, corresponding an activation energy. presence opens up new pathways such as Y, with lower energy.1 The lowering through formation excited species A* B* allows proceed at substrate temperatures or increased rates same temperature when compared CVD.