Method and apparatus for providing surface images
作者： Theresa J. Hopson , Ronald N. Legge
DOI:
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摘要: An apparatus and method for providing a topographical thermal image of semiconductor device. A probe (10) is made from first ribbon material (11) second (12) which forms thermocouple junction (13). tip (15) then attached to the (13) with an epoxy (14). In alternate embodiment present invention, (20) has point region (17) formed by bending portion coating coated thermally conductive material. optical signal reflected off planar (11), (12), or so motion (10,20) can be monitored detector.
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