Method of laser emission spectroscopical analysis and apparatus therefor

摘要: In a method of laser emission spectroscopical analysis, wherein light emitted from the surface sample when beam is irradiated onto spectroscopically analyzed, an mode fixed to gauss distribution type TEM 00 avoid variations in intensity due change mode, and analyzed value obtained spectral line element be measured preset or ratio between pair lines within predetermined range, so that influence wide fluctuations evaporation excitation processes occurring on can eliminated, thereby improving accuracy analysis.