Thermal thin-film sensors for r.m.s. Value measurements

摘要: Abstract Because of their principle operation, r.m.s. thermal converters work at elevated temperatures. Time stability in such conditions is one the major concerns behind choice materials. Reproducibility and time have been achieved here by, using a thin-film microelectronic approach. Such solution also has following advantages: relatively fast response (small dimensions), simplicity fabrication standard process low cost. Two types (linear circular) developed. In both heater made NiCr resistive layer temperature sensor consists Ni thermocouples. Corning 0.1 mm thick glass foil used as substrate. The whole surface protected by 5μm SiO x to improve converter chips are mounted on TO-5 packages. sensitivity proportional resistance thermocouples, which depends thicknesses microstructures layers. For layers having resistivities below 5 Ω/ □ 0.5 respectively, thermocouple about 20μV/K. chip close package base mainly conductivity gas (air) applied an advantage here. A resistivity 2.5 K/mW conversion V/W for our sensors.