Optimization tool for the performance parameters of thermoelectric microsensors

作者: F. Völklein , H. Baltes

DOI: 10.1016/0924-4247(93)80142-4

关键词:

摘要: Abstract A one-dimensional analytical optimization for thin-film thermoelectric microsensors is presented. The results provide a tool the of thermal resistance, sensitivity and detectivity as function geometrical dimensions given material parameters. Curves are that allow performance parameters to be predicted variety

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