Ferroelectric plasma sources and their applications

作者: Y.E. Krasik , K. Chirko , A. Dunaevsky , J.Z. Gleizer , A. Krokhmal

DOI: 10.1109/TPS.2003.808880

关键词:

摘要: We review our experimental studies of ferroelectric plasma sources and their applications. Using various diagnostics, it was shown that the source charged particle emission from is surface plasma. This formed as a result an incomplete discharge on sample. The process formation accompanied by desorption neutrals surface. It parameters neutral flow strongly depend polarization state material driving pulse. lifetime also studied. Electron beams with current amplitude few kiloamperes were generated rep-rate up to 10 Hz under application accelerating pulses amplitudes 25-250 kV. Operation electron diode without prefilling demonstrated. Data concerning uniformity extracted beam potential distribution in are presented. In addition, we present data enhanced mode cathode its promising heavy ions. Results applications low-pressure high-current hollow-cathode discharge, cathodes relativistic magnetrons, switches for generation high-frequency modulated presented well.

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