Influence of a por-Si Buffer Layer on the Optical Properties of Epitaxial InxGa1 –xN/Si(111) Heterostructures with a Nanocolumnar Film Morphology

作者: P. V. Seredin , D. L. Goloshchapov , D. S. Zolotukhin , A. S. Lenshin , A. N. Lukin

DOI: 10.1134/S1063782619010172

关键词:

摘要: Integrated heterostructures exhibiting a nanocolumnar morphology of the InxGa1 –xN film are grown on single-crystal silicon substrate (c-Si(111)) and with nanoporous buffer sublayer (por-Si) by molecular-beam epitaxy plasma activation nitrogen. Using complex spectroscopic methods analysis, it is shown that growth nanocolumns por-Si layer offer number advantages over c-Si substrate. Raman ultraviolet spectroscopy data support inference about nanocolumn structure agree previously obtained X-ray diffraction (XRD) indicative strained, unrelaxed state layer. The positively influences optical properties heterostructures. At same half-width emission line in photoluminescence spectrum, intensity for heterostructure sample ~25% higher than

参考文章(34)
P.V. Seredin, A.S. Lenshin, V.M. Kashkarov, A.N. Lukin, I.N. Arsentiev, A.D. Bondarev, I.S. Tarasov, Ultrathin nano-sized Al2O3 strips on the surface of por-Si Materials Science in Semiconductor Processing. ,vol. 39, pp. 551- 558 ,(2015) , 10.1016/J.MSSP.2015.05.067
P. V. Seredin, A. S. Lenshin, D. L. Goloshchapov, A. N. Lukin, I. N. Arsentyev, A. D. Bondarev, I. S. Tarasov, Investigations of nanodimensional Al2O3 films deposited by ion-plasma sputtering onto porous silicon Semiconductors. ,vol. 49, pp. 915- 920 ,(2015) , 10.1134/S1063782615070210
Long Teng, Rong Zhang, Zi-Li Xie, Tao Tao, Zhao Zhang, Ye-Cao Li, Bin Liu, Peng Chen, Ping Han, You-Dou Zheng, None, Raman Scattering Study of In x Ga 1 −x N Alloys with Low Indium Compositions Chinese Physics Letters. ,vol. 29, pp. 027803- ,(2012) , 10.1088/0256-307X/29/2/027803
M.R. Correia, S. Pereira, J. Frandon, M.A. Renucci, E. Alves, A.D. Sequeira, N. Franco, Analysis of Strain Depth Variations in an In0.19Ga0.81N Layer by Raman Spectroscopy Physica Status Solidi (c). pp. 563- 567 ,(2003) , 10.1002/PSSC.200390114
J.E. Van Nostrand, K.L. Averett, R. Cortez, J. Boeckl, C.E. Stutz, N.A. Sanford, A.V. Davydov, J.D. Albrecht, Molecular beam epitaxial growth of high-quality GaN nanocolumns Journal of Crystal Growth. ,vol. 287, pp. 500- 503 ,(2006) , 10.1016/J.JCRYSGRO.2005.11.073
M. R. Correia, S. Pereira, E. Pereira, J. Frandon, E. Alves, Raman study of the A1(LO) phonon in relaxed and pseudomorphic InGaN epilayers Applied Physics Letters. ,vol. 83, pp. 4761- 4763 ,(2003) , 10.1063/1.1627941
PV Seredin, EP Domashevskaya, IN Arsentyev, DA Vinokurov, AL Stankevich, None, Properties of epitaxial (Al x Ga1 − x As)1 − y C y alloys grown by MOCVD autoepitaxy Semiconductors. ,vol. 47, pp. 7- 12 ,(2013) , 10.1134/S1063782613010211
A.S. Lenshin, P.V. Seredin, B.L. Agapov, D.A. Minakov, V.M. Kashkarov, Preparation and degradation of the optical properties of nano-, meso-, and macroporous silicon Materials Science in Semiconductor Processing. ,vol. 30, pp. 25- 30 ,(2015) , 10.1016/J.MSSP.2014.09.040
S. Albert, A. Bengoechea-Encabo, P. Lefebvre, M. A. Sanchez-Garcia, E. Calleja, U. Jahn, A. Trampert, Emission control of InGaN nanocolumns grown by molecular-beam epitaxy on Si(111) substrates Applied Physics Letters. ,vol. 99, pp. 131108- ,(2011) , 10.1063/1.3644986
Sadanand V. Deshpande, Erdogan Gulari, Steven W. Brown, Stephen C. Rand, Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition Journal of Applied Physics. ,vol. 77, pp. 6534- 6541 ,(1995) , 10.1063/1.359062