Diagnostic studies of YBa2Cu3O7−δ laser ablation
作者： N. S. Nogar , R. C. Dye , R. C. Estler , S. R. Foltyn , R. E. Muenchausen
DOI: 10.1007/BFB0048347
关键词:
摘要: The use of a variety diagnostics can offer significant insight into the mechanisms laser ablation and film growth. It seems clear that under conditions optimum growth collisional processes occur both within laser-desorbed plume, between plume processing gas. These are responsible for macroscopic characteristics including velocity spatial distributions, ratio ions particles to neutral atoms molecules, incorporation oxygen film. is also obvious real-time diagnostics, applicable relevant production, could provide useful process monitors feedback control production HTSC thin films.
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Daniel J Ehrlich, Jeffrey Y Tsao, None, Laser microfabrication : thin film processes and lithography Academic Press. ,(1989)
Richard Chace Tolman, The Principles of Statistical Mechanics ,(1938)
C. H. Becker, J. B. Pallix, Laser ablation of bulk YBa2Cu3O7−δ and cluster emission Journal of Applied Physics. ,vol. 64, pp. 5152- 5156 ,(1988) , 10.1063/1.342424
Roger Kelly, On the dual role of the Knudsen layer and unsteady, adiabatic expansion in pulse sputtering phenomena Journal of Chemical Physics. ,vol. 92, pp. 5047- 5056 ,(1990) , 10.1063/1.458540
J. P. Zheng, Z. Q. Huang, D. T. Shaw, H. S. Kwok, Generation of high‐energy atomic beams in laser‐superconducting target interactions Applied Physics Letters. ,vol. 54, pp. 280- 282 ,(1989) , 10.1063/1.101553
G. Koren, A. Gupta, E. A. Giess, A. Segmüller, R. B. Laibowitz, Epitaxial films of YBa2Cu3O7−δon NdGaO3, LaGaO3, and SrTiO3substrates deposited by laser ablation Applied Physics Letters. ,vol. 54, pp. 1054- 1056 ,(1989) , 10.1063/1.101559
D. B. Geohegan, D. N. Mashburn, Characterization of ground‐state neutral and ion transport during laser ablation of Y1Ba2Cu3O7−xusing transient optical absorption spectroscopy Applied Physics Letters. ,vol. 55, pp. 2345- 2347 ,(1989) , 10.1063/1.102362
P. K. Schenck, D. W. Bonnell, J. W. Hastie, Laser vaporization mass spectrometry of refractory materials: Graphite and YBa2Cu3Ox Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 7, pp. 1745- 1749 ,(1989) , 10.1116/1.576038
J. Narayan, N. Biunno, R. Singh, O. W. Holland, O. Auciello, Formation of thin superconducting films by the laser processing method Applied Physics Letters. ,vol. 51, pp. 1845- 1847 ,(1987) , 10.1063/1.98489
B. Roas, L. Schultz, G. Endres, Epitaxial growth of YBa2Cu3O7−x thin films by a laser evaporation process Applied Physics Letters. ,vol. 53, pp. 1557- 1559 ,(1988) , 10.1063/1.100437