Laser microfabrication : thin film processes and lithography

摘要: Technology. Y.S. Liu, Sources, Optics, and Laser Microfabrication Systems for Direct Writing Projection Lithography. Fundamentals. T.J. Chuang, Laser-Stimulated Molecular Processes on Surfaces. M. Rothschild, Spectroscopy Photochemistry of Gases, Adsorbates, Liquids. C.I.H. Ashby J.Y. Tsao, Photophysics Thermophysics Light Absorption Energy Transport in Solids. H.J. Zeiger, D.J. Ehrlich, Kinetics. Reactions. J.J. Ritsko, Etching. R.L. Jackson, T.H. Baum, T.T. Kodas, P.B. Comita, Deposition: Energetics Chemical J. Haigh M.R. Aylett, Experimental Approaches. S.J.C. Irvine, Epitaxy. I.W. Boyd, Doping Oxidation. Index.