Thin-Film Piezoelectric Materials For a Better Energy Harvesting MEMS
作者： Kiyotaka Wasa , Tomoaki Matsushima , Hideaki Adachi , Isaku Kanno , Hidetoshi Kotera
DOI: 10.1109/JMEMS.2011.2181156
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摘要: … to improve their dielectric and piezoelectric properties for fabricating the better piezo… piezoelectric material design/measurements and thinfilm processing for the better piezoelectric …
sci-hub.se 参考文章(27)
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