Design and fabrication of a new two-dimensional pneumatic micro-conveyor

摘要: This paper presents the design, fabrication and testing of a new two-dimensional pneumatic conveyor for micro-chips manipulation. The can levitate move flat objects to desired position using controlled air-flow. structure consists sandwich silicon–silicon–Pyrex layers fabricated MEMS technologies, in which deep reactive ion etching (DRIE) ultrasonic micro-machining techniques were used silicon Pyrex chips, respectively. silicon–silicon wafers silicon–Pyrex bonded by gold eutectic bonding anodic techniques, device array is about 9 mm × surface dimension composed 8 micro-conveyors. A micro-conveyor has four nozzles that generate inclined air-jets allowing conveyance directions. We demonstrate experimentally 3 diameter object 2 mg weight be conveyed with intermittent air-flow 20 kPa.