Flexible and translucent PZT films enhanced by the compositionally graded heterostructure for human body monitoring

摘要: Abstract As a typical ferroelectric material, the PbZr1−xTix O3 (PZT) thin film with homogeneous component has drawn extensive attention to application in self-powered flexible electronics. The design of compositionally graded PZT films (i.e. artificially control Zr/Ti ratio different compositional layers one film) shown its immense potentials due some novel phenomena induced by strain gradient, such as shifted hysteresis loop, generation built-in electric field, enhancement motion domain wall. However, effect heterostructure on piezoelectric response and performance device level seldom been investigated. To fill this knowledge gap, we prepare structure based that, fabricate nanogenerators (PENGs). Furthermore, explore 2D mica substrate PENGs avoid commonly used costly troublesome laser-lifting or etching transfer procedure. PENG prototypes integrated 1 µm thick are flexible, translucent, show high responses under mechanical stimuli. Experiments indicate that up-graded films, which Zr composition varies from 20% near bottom 80% at top, outperforms down-graded counterpart. achieves maximum voltage 2 V current density 10.0 μA/cm2 when bent 90 ° . This work demonstrates strain-tuned is an effective approach improve performance.