Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process

作者: Young Ho Do , Woo Suk Jung , Min Gyu Kang , Chong Yun Kang , Seok Jin Yoon

DOI: 10.1016/J.SNA.2012.10.034

关键词:

摘要: Abstract The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr 0.52 Ti 0.48 O 3 (PZT) films, which were fabricated by laser lift-off (LLO) process, studied for a harvester. Through the introduction indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs implemented, respectively. PZT films generated an AC-type output signal power 8.4 nW/cm 2 , at periodically bending releasing motion. In addition, inverted signals observed when manufactured connected to measuring equipment in reverse bended direction, demonstrating that generating originated from effect TFDs. experimental results clearly showed film have potential use next electronic applications such as devices, electronics,

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