Fabrication of flexible device based on PAN-PZT thin films by laser lift-off process
作者： Young Ho Do , Min Gyu Kang , Jin Sang Kim , Chong Yun Kang , Seok Jin Yoon
DOI: 10.1016/J.SNA.2012.06.012
关键词:
摘要: Abstract The ferroelectric properties of flexible devices based on 0.05Pb(Al 0.5 Nb )O 3 –0.95Pb(Zr 0.52 Ti 0.48 + 0.7 wt.%Nb 2 O 5 + 0.5 wt.%MnO (PAN-PZT) thin films, which were fabricated using a laser lift-off (LLO) process, investigated. PAN-PZT films coated with sacrificial layer, prevented or minimized damage during LLO process. structural and electrical the before after process demonstrated that crystallographic device retained Flexible layer may be for production electronic devices.
elsevier.com
sci-hub.se 参考文章(16)
Kenji Nomura, Hiromichi Ohta, Akihiro Takagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono, Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors Nature. ,vol. 432, pp. 488- 492 ,(2004) , 10.1038/NATURE03090
Y.H. Chu, S.J. Lin, K.S. Liu, I.N. Lin, Low-temperature laser processes for synthesizing (100)-textured Pb(Zr,Ti)O3 thin films on Si substrate Applied Physics A. ,vol. 81, pp. 1059- 1063 ,(2005) , 10.1007/S00339-004-2947-9
Y. Chen, J. Au, P. Kazlas, A. Ritenour, H. Gates, M. McCreary, Electronic paper: Flexible active-matrix electronic ink display Nature. ,vol. 423, pp. 136- 136 ,(2003) , 10.1038/423136A
Chun-Ching Hsiao, Jing-Chih Ciou, An-Shen Siao, Chi-Yuan Lee, Temperature field analysis for PZT pyroelectric cells for thermal energy harvesting. Sensors. ,vol. 11, pp. 10458- 10473 ,(2011) , 10.3390/S111110458
W. S. Wong, T. Sands, N. W. Cheung, M. Kneissl, D. P. Bour, P. Mei, L. T. Romano, N. M. Johnson, Fabrication of thin-film InGaN light-emitting diode membranes by laser lift-off Applied Physics Letters. ,vol. 75, pp. 1360- 1362 ,(1999) , 10.1063/1.124693
Jun Hyuk Cheon, Jung Ho Bae, Jin Jang, Mechanical stability of poly-Si TFT on metal foil Solid-State Electronics. ,vol. 52, pp. 473- 477 ,(2008) , 10.1016/J.SSE.2007.10.019
X L Tong, L Li, D S Zhang, Y T Dai, D J Lv, K Ling, Z X Liu, P X Lu, G Yang, Z Y Yang, H Long, The influences of laser scanning speed on the structural and optical properties of thin GaN films separated from sapphire substrates by excimer laser lift-off Journal of Physics D. ,vol. 42, pp. 045414- ,(2009) , 10.1088/0022-3727/42/4/045414
Masahiro Orita, Hiroaki Tanji, Masataka Mizuno, Hirohiko Adachi, Isao Tanaka, Mechanism of electrical conductivity of transparent InGaZnO 4 Physical Review B. ,vol. 61, pp. 1811- 1816 ,(2000) , 10.1103/PHYSREVB.61.1811
W. D. Kingery, D. R. Uhlmann, H. K. Bowen, R. Frieser, Introduction to Ceramics ,(1976)
J. Robertson, W. L. Warren, Energy Levels of Point Defects in Perovskite Oxides MRS Proceedings. ,vol. 361, pp. 123- ,(1994) , 10.1557/PROC-361-123