Rugate optical filter systems
作者： Narayan P. Murarka , Kent J. Kogler , Richard J. Harris , Howard T. Betz , Craig S. Bartholomew
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摘要: A heterodyning interferometric monitoring apparatus for simultaneously measuring in situ and real time the optical physical thicknesses of a sample during deposition process. linearly polarized monochromatic light beam is passed through frequency shifter which produces therefrom dichromatic having two orthogonally components at respective different frequencies. The applied to modified Twyman-Greene interferometer, from heterodyne beams emerge. first combination reflected second reference plate, thickness can be determined using signal detector. another
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