Etchant, replenishment solution and method for forming copper wiring
作者： Hirofumi Kodera , Ikuyo Katayama , Shota Hishikawa
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摘要: An etchant for copper includes an acid and one or more compounds selected from the group consisting of aliphatic noncyclic compound, heterocyclic compound a heteroaromatic compound. The is saturated (A) including only two nitrogen atoms as heteroatoms, 2 to 10 carbon atoms. (B) five-, six-, seven-membered ring having heteroatoms constituting ring. (C) six-membered
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