Identification of artifacts in Auger electron spectroscopy due to surface topography
作者： A. Gelsthorpe , M. M. El-Gomati
DOI: 10.1116/1.1545719
关键词:
摘要: The application of Auger electron spectroscopy to sharp topographies, such as microfabricated field emitters, leads two analysis artifacts; edge enhancement and shadowing. As a result, the detected peak heights can change by more than 100%; potentially giving rise wrong conclusions being drawn about elemental surface concentrations. A single-pass cylindrical mirror analyzer has been modified for use in rapid identification artifacts. modifications comprises multichannel detector divided into six segments spanning 360° azimuth an electrostatic lens that passes electrons along same exit trajectory independently their energy. Preliminary results instrument tungsten coated volcano-shaped silicon field-emitter structure are reported. simultaneously shows different artifacts spectra due experiment demonstrate...
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