Quantitative AES and XPS

摘要: A brief review is given of the status tests quantitative AES and XPS theory using three databases true [1–5] spectra for [6-9], [8-10] REELS [10-12], respectively. For analysis by XPS, it important to test use correct sensitivity factors. We develop our previous analyses peak area intensities elemental in digital Auger X-ray photoelectron measured a fully calibrated spectrometer. The intensities, instead being analysed after removal Tougaard background are now extrinsic characteristic loss deconvolving angle-averaged reflected electron energy (REELS). show clear intrinsic shake-up reduced around 30% total intensities. comparison experiment within new matrix-less quantification formulation, average matrix factors, an example which shown Fig 1, leads correlations with rms scatters 8% 11% respectively, very wide range transitions. This gives formulae values appropriate spectrometers give spectra.