Quantitative AES VII. The ionization cross‐section in AES

作者: M. P. Seah , I. S. Gilmore

DOI: 10.1002/(SICI)1096-9918(199810)26:11<815::AID-SIA427>3.0.CO;2-1

关键词:

摘要: Inner shell ionization cross-sections are analyzed for use with Auger electron spectroscopy (AES). Correlations of the Gryzinski, Casnati et al., Jakoby al. and Drawin made experimental data from digital database. al.'s cross-section is realistic K ionizations but can become negative other shells unless modified, so limited AES. Results ratios calculated intensities beam energies 5 keV 10 keV, overpotentials in range 2–60, used to rank effectiveness remaining three cross-sections. The show means scatter standard deviations 1.01±0.12, 0.99±0.05 1.04±0.09 when compared predictions Drawin, respectively. provides best correlation, goodness fit being similar K, L, M N shells. therefore recommended future Gryzinski's or Drawin's cross-sections, by comparison, lead errors as high 50% at low value 1.5 overpotential (i.e. high-energy electrons). © Crown copyright 1998. Reproduced permission Controller Her Majesty's Stationery Office.

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