Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices
作者： Axel Grosse , Matthias Grewe , Henning Fouckhardt
DOI: 10.1088/0960-1317/11/3/315
关键词:
摘要: … and aligned direct bonding. We have developed a single-layer photoresist soft mask which … The soft mask developed in this paper consists of the photoresist AZ5214e from Clariant. It …
harvard.edu
sci-hub.se 参考文章(15)
Peter C. Simpson, Adam T. Woolley, Richard A. Mathies, Microfabrication Technology for the Production of Capillary Array Electrophoresis Chips Biomedical Microdevices. ,vol. 1, pp. 7- 26 ,(1998) , 10.1023/A:1009922004301
Lance B. Koutny, Dieter Schmalzing, Todd A. Taylor, Martin Fuchs, Microchip electrophoretic immunoassay for serum cortisol Analytical Chemistry. ,vol. 68, pp. 18- 22 ,(1996) , 10.1021/AC9508311
Thierry Corman, Peter Enoksson, Göran Stemme, Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask Journal of Micromechanics and Microengineering. ,vol. 8, pp. 84- 87 ,(1998) , 10.1088/0960-1317/8/2/010
A. Manz, N. Graber, H.M. Widmer, Miniaturized total chemical analysis systems: A novel concept for chemical sensing Sensors and Actuators B: Chemical. ,vol. 1, pp. 244- 248 ,(1990) , 10.1016/0925-4005(90)80209-I
A.M. Malyarevich, K.V. Yumashev, N.N. Posnov, V.P. Mikhailov, V.S. Gurin, Optical transient bleaching and induced absorption of surface-oxidized CuFeS nanoparticles Applied Physics B. ,vol. 70, pp. 111- 116 ,(2000) , 10.1007/S003400050017
R. W. Terhune, P. D. Maker, C. M. Savage, Measurements of Nonlinear Light Scattering Physical Review Letters. ,vol. 14, pp. 681- 684 ,(1965) , 10.1103/PHYSREVLETT.14.681
M. Grewe, A. Grosse, H. Fouckhardt, Theoretical and experimental investigations of the optical waveguiding properties of on-chip microfabricated capillaries Applied Physics B. ,vol. 70, pp. 839- 847 ,(2000) , 10.1007/PL00021143
Holger Becker, Ulf Heim, Hot embossing as a method for the fabrication of polymer high aspect ratio structures Sensors and Actuators A: Physical. ,vol. 83, pp. 130- 135 ,(2000) , 10.1016/S0924-4247(00)00296-X
Koen Clays, André Persoons, Hyper‐Rayleigh scattering in solution Review of Scientific Instruments. ,vol. 63, pp. 3285- 3289 ,(1992) , 10.1063/1.1142538
Axel Grosse, Matthias Grewe, Henning Fouckhardt, On-chip microfabricated capillaries for hyper Rayleigh scattering of nonlinear-optical organic molecules 2000 International Conference on Application of Photonic Technology (ICAPT 2000). ,vol. 4087, pp. 1056- 1066 ,(2000) , 10.1117/12.406349