High throughput nanofabrication of silicon nanowire and carbon nanotube tips on AFM probes by stencil-deposited catalysts.
作者： Daniel S. Engstrom , Veronica Savu , Xueni Zhu , Ian Y. Y. Bu , William I. Milne
DOI: 10.1021/NL104384B
关键词:
摘要: A new and versatile technique for the wafer scale nanofabrication of silicon nanowire (SiNW) multiwalled carbon nanotube (MWNT) tips on atomic force microscope (AFM) probes is presented. Catalyst material SiNW MWNT growth was deposited prefabricated AFM using aligned nanostencil lithography. Individual vertical SiNWs were grown epitaxially by a catalytic vapor liquidsolid (VLS) process MWNTs plasma-enhanced chemical (PECVD) probes. The tested imaging micrometers-deep trenches, where they demonstrated significantly better performance than commercial high aspect ratio tips. Our method demonstrates reliable cost-efficient route toward manufacturing
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