Growth and characterization of radio‐frequency plasma deposited gold‐carbon composites

作者: J. L. Flouttard , J. Akinnifesi , E. Cambril , B. Despax

DOI: 10.1063/1.349637

关键词:

摘要: Gold‐hydrocarbon composite thin films with various metal volume fractions have been deposited by a combination of sputtering and plasma deposition in argon‐propane plasma. Partial pressure control optical spectroscopy the gas phase shown growth processes to be partially dependent on chemical reactions occurring substrate. The polymer matrix structure was analyzed several techniques found consist dense hydrocarbon density 1.7. For low fractions, spectra show that dielectric nature predominates while metallic governs absorption phenomenon for gold‐rich films. Electrical conductivity measurements revealed influence graphitic structures film just above fraction p=0.03, below which carbon‐carbon sp2 bonds are more predominant. Similarly percolation threshold has occur at about p=0.3 exponent is evaluated 1.55.

参考文章(16)
F. Jansen, J. Mort, Plasma deposited thin films pdtf. ,(1986)
A. L. Efros, B. I. Shklovskii, Critical Behaviour of Conductivity and Dielectric Constant near the Metal-Non-Metal Transition Threshold Physica Status Solidi B-basic Solid State Physics. ,vol. 76, pp. 475- 485 ,(1976) , 10.1002/PSSB.2220760205
J. Perrin, B. Despax, V. Hanchett, E. Kay, Microstructure and electrical conductivity of plasma deposited gold/fluorocarbon composite films Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 4, pp. 46- 51 ,(1986) , 10.1116/1.573496
Yoshihiro Asano, Metal-containing plasma-polymerized films Thin Solid Films. ,vol. 105, pp. 1- 8 ,(1983) , 10.1016/0040-6090(83)90324-3
A. Bubenzer, B. Dischler, G. Brandt, P. Koidl, rf‐plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications Journal of Applied Physics. ,vol. 54, pp. 4590- 4595 ,(1983) , 10.1063/1.332613
N. Wada, P.J. Gaczi, S.A. Solin, “Diamond-like” 3-fold coordinated amorphous carbon Journal of Non-crystalline Solids. pp. 543- 548 ,(1980) , 10.1016/0022-3093(80)90651-1
J. Perrin, B. Despax, E. Kay, Optical properties and microstructure of gold-fluorocarbon-polymer composite films Physical Review B. ,vol. 32, pp. 719- 732 ,(1985) , 10.1103/PHYSREVB.32.719
Eric Kay, M. Hecq, Metal clusters in plasma polymerized matrices: Gold Journal of Applied Physics. ,vol. 55, pp. 370- 374 ,(1984) , 10.1063/1.333082