X-ray photoelectron and vibrational spectroscopic studies of TeC:H films for optical disk memory
作者： Hideki Ohkawa , Motonari Matsubara , Nobuaki Yasuda , Norio Ozawa
DOI: 10.1016/0040-6090(94)90243-7
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摘要: The valence band spectrum of a TeC:H film was found to be essentially the same as that amorphous elemental tellurium using X-ray photoelectron spectroscopy. Raman and Fourier transform far-IR spectra were examined based on phonon density states for tellurium, peak corresponding vibration identified at 150 cm−1. Organic TeC bonding in film, origin this is discussed by taking into consideration deposition process, including surface reaction target. chemical sputtering process suggested contribute film.
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