Structural and mechanical properties of niobium-containing amorphous hydrogenated carbon films (NbC:H)

作者: C. Benndorf , M. Fryda , C.-P. Klages , K. Taube , H.-G. Haubold

DOI: 10.1016/0921-5093(91)90516-P

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摘要: Abstract The mechanical and microstructural properties of Nb-containing amorphous hydrogenated carbon films were determined with complementary techniques. For the characterization behaviour residual stress, abrasive wear, film hardness Young's modulus (using a nanometer indenter), fracture strain measured. One most striking results is substantial minimum in wear NbC:H for 10–20 at.% metal concentration. X-ray diffraction techniques (wide angle as well small diffraction) photoelectron spectroscopy revealed granular structure precipitated clusters (2–4 nm diamter) cubic NbC surrounded by metal-free a-C:H matrix.

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