Cr-diamondlike carbon nanocomposite films: Synthesis, characterization and properties

摘要: Abstract Diamondlike carbon (DLC) films, known for exhibiting attractive combination of properties, have been extensively studied in the recent past. The inherent, internal compressive stresses affecting their adhesion and relatively low thermal stability above 400 °C are two major drawbacks preventing wide usage these films. Carbide formers incorporated into network potential to stabilize film structure, relax improve performance. present work focuses on synthesis, structure mechanical tribological property characterization Cr-containing nanocomposite DLC films were synthesized using a plasma-enhanced hybrid chemical vapor physical deposition process discharge composed mixture CH 4 Ar gases. Cr content varied up 18 at.%. morphology composition characterized by scanning transmission electron microscopy, X-ray photoelectron spectroscopy nuclear reaction analysis. behavior was as function concentration conducting nanoindentation pin-on-disc experiments, respectively. results showed that can be either amorphous with dispersed metallic-like (at content) or consisting face-centered cubic metastable CrC nanoparticles matrix. Films (  12 at.%) larger chromium carbide particles an adverse effect wear resistance. offer opportunity combine excellent other desirable properties deriving from presence second phase.