Method and device for producing film-shaped mold, and film-shaped mold
作者： Ryuichi Ito , 伊藤 隆一 , 隆一 伊藤
DOI:
关键词:
摘要: PROBLEM TO BE SOLVED: To provide a method and device for producing film-shaped mold excellent in transferability, also to having fine uneven structure given thereto with high accuracy.SOLUTION: A first (103) equipped substance (201) be transferred on which photosetting resin is coated are pasted each other by pasting means (207). After photo-setting, the second (203) exfoliated from demolding (211). Transportation distances of point same other.
lens.org 参考文章(4)
Mahadevan Ganapathisubramanian, Byung-Jin Choi, Michael N. Miller, Sidlgata V. Sreenivasan, Se Hyun Ahn, Large area imprint lithography ,(2013)
Marc Beck, Matthias Keil, Babak Heidari, Imprint stamp comprising Cyclic Olefin copolymer ,(2006)
Johan Ring, Matthias Keil, Jakob Nilsson, Babak Heidari, Methods and processes for modifying polymer material surface interactions ,(2009)
布士人 山口, Fujito Yamaguchi, Ryuichi Ito, 隆一 伊藤, Jun Furuike, 潤 古池, Method for manufacturing fine pattern ,(2011)