Large area imprint lithography
作者： Mahadevan Ganapathisubramanian , Byung-Jin Choi , Michael N. Miller , Sidlgata V. Sreenivasan , Se Hyun Ahn
DOI:
关键词: Nanotechnology 、 Replication (microscopy) 、 Substrate (printing) 、 Materials science 、 Lithography 、 Template
摘要: Methods and systems are provided for patterning polymerizable material dispensed on flexible substrates or flat using imprint lithography techniques. Template replication methods also presented where patterns from a master transferred to form film templates. Such templates then used pattern large area substrates. Contact between the template substrate can be initiated propagated by relative translation substrate.
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