Thermal conductivity of sputtered amorphous Ge films

摘要: We measured the thermal conductivity of amorphous Ge films prepared by magnetron sputtering. The was significantly higher than value predicted minimum model and increased with deposition temperature. found that variations in sound velocity film density were not main factors high conductivity. Fast Fourier transform patterns transmission electron micrographs revealed short-range order responsible for their results provide experimental evidences to understand underlying nature variation phonon mean free path solids.