Vapour deposition method for preparing amorphous lithium-containing compounds
作者： Chihiro Yada , Duncan Clifford Alan Smith , David Michael Laughman , Laura Mary Perkins , Alexandros Anastasopoulos
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摘要: A vapour deposition method for preparing an amorphous lithium-containing oxide or oxynitride compound not containing phosphorous comprises providing a source of each component element the compound, including at least lithium, oxygen, nitrogen in case and sources one more glass-forming elements; heating substrate to substantially 180°C above; co-depositing elements from onto heated wherein react on form compound.
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