Ferroelectric capacitor and a semiconductor device having the same
作者： Mitsuo Harata , Motomasa Imai , Koji Yamakawa , Hiroshi Toyoda , Kazuhide Abe
DOI:
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摘要: A ferroelectric capacitor includes a layer consisting of lead zirconate titanate formed on silicon substrate, plurality rectangular trenches in the direction thickness with material therebetween, and first second electrodes metal tungsten buried to oppose each other therebetween.
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