Piezoelectric element, piezoelectric actuator device, liquid ejecting head, liquid ejecting apparatus, and ultrasonic wave measurement apparatus
作者： Yasuhiro Itayama , Takayuki Yonemura , Chikara Kojima
DOI:
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摘要: A piezoelectric element in which a first electrode (60), body layer (70) comprised of composite oxide having perovskite structure that includes at least Pb, Nb and Ti, second (80) are sequentially laminated on substrate (10), crystal configures the has tetragonal structure, is {100} oriented to region (100) plane (001) perpendicular with respect direction lamination, mixed inside lattice crystal.
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