PZT MEMS Actuated Flapping Wings for Insect-Inspired Robotics

作者: J.R. Bronson , J.S. Pulskamp , R.G. Polcawich , C.M. Kroninger , E.D. Wetzel

DOI: 10.1109/MEMSYS.2009.4805566

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摘要: This paper presents microfabricated flapping-wings for insect-inspired flying robots. To the authors' knowledge, this is first report of any such MEMS devices application. work a component on-going efforts by US Army Research Laboratory (ARL) in developing millimeter-scale robotic platforms using thin-film lead zirconium titanate (PZT) actuators. Micromachined wing-structures have been successfully fabricated and experimental results flapping frequency stroke-amplitude from set wing designs varying material composition dimensions. These establish feasibility achieving stroke amplitudes comparable to insects with PiezoMEMS technology.

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