Single step etched two dimensional grating coupler based on the SOI platform
作者： Jinghui Zou , Yu Yu , Xinliang Zhang
DOI: 10.1364/OE.23.032490
关键词:
摘要: We design and demonstrate a single step etched two dimensional grating coupler (2D GC) based on the silicon-on-insulator (SOI) platform using subwavelength cylinders. Taking the …
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harvard.edu参考文章(31)
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