All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect

作者: Jilin Yang , Tao Ge , Chris Summitt , Sunglin Wang , Tom Milster

DOI: 10.1117/12.2187143

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摘要: We proposed and demonstrated a new all-polymer based fabrication process for an flexible parallel optical interconnect cable in which vertical light coupler is integrated. The approach potentially cut down the cost by eliminating metallization alignment of multiple masks. Throughout we used polyimide as the substrate, coated by Epoclad claddings, then AP2210B WPR 5100 were to fabricate waveguides 45 degree mirror couplers, respectively. In addition, precisely aligned couplers are achieved using polymer-based, non-metallic, transparent phase-based marks. tested feature specific phase-based alignment system. shape depth marks optimized phase contrast and Schlieren imaging. Our results shows that contrast image enhanced compared observed a conventional imaging Such enables integrate polymer only using polymer based on layer.

参考文章(16)
Lan Li, Yi Zou, Hongtao Lin, Juejun Hu, Xiaochen Sun, Ning-Ning Feng, Sylvain Danto, Kathleen Richardson, Tian Gu, Michael Haney, Chip-to-chip optical interconnects based on flexible integrated photonics Proceedings of SPIE. ,vol. 8991, ,(2014) , 10.1117/12.2037812
Tao Ge, Jilin Yang, Chris Summitt, Sunglin Wang, Lee Johnson, Melissa Zaverton, Tom Milster, Yuzuru Takashima, High contrast and metal-less alignment process for all-polymer optical interconnect devices Proceedings of SPIE. ,vol. 9374, ,(2015) , 10.1117/12.2079620
F. Zernike, Phase contrast, a new method for the microscopic observation of transparent objects Physica D: Nonlinear Phenomena. ,vol. 9, pp. 686- 698 ,(1942) , 10.1016/S0031-8914(42)80035-X
Chris Summitt, Sunglin Wang, Lee Johnson, Melissa Zaverton, Tao Ge, Tom Milster, Yuzuru Takashima, Micro-optics fabrication by mask-based and mask-less mixed lithography process towards 3D optical circuits Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII. ,vol. 8974, ,(2014) , 10.1117/12.2045234
Fengtao Wang, Fuhan Liu, Ali Adibi, 45 Degree Polymer Micromirror Integration for Board-Level Three-Dimensional Optical Interconnects Optics Express. ,vol. 17, pp. 10514- 10521 ,(2009) , 10.1364/OE.17.010514
Melissa A. Zaverton, Justin Sierchio, Young-Sik Kim, Delbert Hansen, Warren Bletcher, John Tamkin, Thomas Milster, Maskless Lithography Tool for Fabrication and Inspection of Diffractive Optical Elements and Computer Generated Holograms International Optical Design Conference and Optical Fabrication and Testing (2010), paper OTuC5. ,(2010) , 10.1364/OFT.2010.OTUC5
Ming-Jun Li, Brett Hoover, Vladimir N. Nazarov, Douglas L. Butler, Multicore fiber for optical interconnect applications opto-electronics and communications conference. pp. 564- 565 ,(2012) , 10.1109/OECC.2012.6276573
Tao Ge, Jilin Yang, Yuzuru Takashima, Phase contrast alignment for all polymer optical interconnect devices Frontiers in Optics. ,(2014) , 10.1364/FIO.2014.FW5A.4
F. Zernike, How I discovered phase contrast. Science. ,vol. 121, pp. 345- 349 ,(1955) , 10.1126/SCIENCE.121.3141.345