45 Degree Polymer Micromirror Integration for Board-Level Three-Dimensional Optical Interconnects
作者： Fengtao Wang , Fuhan Liu , Ali Adibi
DOI: 10.1364/OE.17.010514
关键词:
摘要: We introduce here a simple method of integrating 45 degrees total internal reflection micro-mirrors with polymer optical waveguides by an improved tilted beam photolithography on printed circuit boards to provide surface normal light coupling between and optoelectronic devices for interconnects. De-ionized water is used couple ultraviolet through the waveguide core layer at angle during photo exposure process. This technique compatible PCB manufacturing facility suitable large panel board-level manufacturing. The mirror slope controlled accurately (within +/- 1 degrees) high repeatability. insertion loss uncoated micro-mirror measured be 1.6 dB.
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S. Lehmacher, A. Neyer, Integration of polymer optical waveguides into printed circuit boards Electronics Letters. ,vol. 36, pp. 1052- 1053 ,(2000) , 10.1049/EL:20000742
J.W. Goodman, F.J. Leonberger, Sun-Yuan Kung, R.A. Athale, Optical interconnections for VLSI systems Proceedings of the IEEE. ,vol. 72, pp. 850- 866 ,(1984) , 10.1109/PROC.1984.12943
Matthew L. Moynihan, Bruno Sicard, Tuan Ho, Luke Little, Nick Pugliano, James G. Shelnut, Hai Bin Zheng, Phil Knudsen, Dan Lundy, Nancy Chiarotto, Curtis Lustig, Craig Allen, Progress toward board-level optical interconnect technology Photonics packaging and integration. Conference. ,vol. 5731, pp. 50- 62 ,(2005) , 10.1117/12.594675
Fengtao Wang, Fuhan Liu, Gee-Kung Chang, Ali Adibi, Precision measurements for propagation properties of high-definition polymer waveguides by imaging of scattered light Optical Engineering. ,vol. 47, pp. 024602- ,(2008) , 10.1117/1.2842390
Li Wang, Xiaolong Wang, Wei Jiang, Jinho Choi, Hai Bi, Ray Chen, None, 45° polymer-based total internal reflection coupling mirrors for fully embedded intraboard guided wave optical interconnects Applied Physics Letters. ,vol. 87, pp. 141110- ,(2005) , 10.1063/1.2084331
Jin Tae Kim, Byeong Cheol Kim, Myung Yung Jeong, Man Seop Lee, Fabrication of a micro-optical coupling structure by laser ablation Journal of Materials Processing Technology. ,vol. 146, pp. 163- 166 ,(2003) , 10.1016/J.JMATPROTEC.2003.10.010
Ming Li, Stephen J. Sheard, Waveguide couplers using parallelogramic-shaped blazed gratings Optics Communications. ,vol. 109, pp. 239- 245 ,(1994) , 10.1016/0030-4018(94)90686-6
Tetsuzo Yoshimura, Masayoshi Miyazaki, Yosuke Miyamoto, Noriyuki Shimoda, Akihide Hori, Kunihiko Asama, Three-Dimensional Optical Circuits Consisting of Waveguide Films and Optical Z-Connections Journal of Lightwave Technology. ,vol. 24, pp. 4345- 4352 ,(2006) , 10.1109/JLT.2006.883679
A.V. Krishnamoorthy, D.A.B. Miller, Scaling optoelectronic-VLSI circuits into the 21st century: a technology roadmap IEEE Journal of Selected Topics in Quantum Electronics. ,vol. 2, pp. 55- 76 ,(1996) , 10.1109/2944.541875
Nina Hendrickx, JÜrgen Van Erps, Erwin Bosman, Christof Debaes, Hugo Thienpont, Peter Van Daele, Embedded Micromirror Inserts for Optical Printed Circuit Boards IEEE Photonics Technology Letters. ,vol. 20, pp. 1727- 1729 ,(2008) , 10.1109/LPT.2008.2004563