Gas abatement system

摘要: Provided is a gas abatement system including piping. This can be made overall more compact, with better serviceability, and at lower cost. A provided with: water-cooled combustion-type apparatus that performs combustion decomposition scrub dust collection on gases to processed include silane, which semiconductor material gas, as well gaseous fluoride such NF3, CF4, C2F6, SF6, CHF3 or CF6, used cleaning for instance, in plasma of air-tight chambers C1, C2 . Cn CVD the like; an electrostatic precipitator electric after performing collection; pipe feeds plant scrubber facility.