Feasibility of a New Atom Probe Specimen Preparation Method Using a Focused Ion Beam
作者： S. Mikami , N. Mayama , T. Iwata , T. Kaito , T. Adachi
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摘要: Specimens for three-dimensional atom probe (3DAP) analysis must be needle-shaped and the apex of specimen is primarily fabricated by focused ion beam (FIB). In preparation FIB, gallium ions are generally implanted into surface region during irradiations ions. Therefore, structure disarranged amorphous. This phenomenon makes it difficult to reconstruct a image specimen. The implantation caused irradiating with FIB. this study, we propose new method in which FIB irradiated from behind needle due avoids assembly was installed instrument. specimens were means conventional proposed methods analyzed our laboratory. It shown that not only but also rupture inhibited method. [DOI: 10.1380/ejssnt.2009.863]
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