Micropump assembly for a microgas chromatograph and the like
作者： Peter D. Washabaugh , Aaron A. Astle , Hanseup S. Kim , Luis P. Bernal , Khalil Najafi
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摘要: A MEMS-fabricated microvacuum pump assembly is provided. The designed to operate in air and can be easily integrated into microfluidic systems. includes a series of pumping cavities with electrostatically-actuated membranes interconnected by microvalves. large deflection electrostatic actuator has curved fixed drive electrode flat movable polymer electrode. electrodes are fabricated buckling the out-of-plane using compressive stress, parallel-plane actuators formed allows travel over larger distances than possible electrode, lower voltage. parylene membrane that placed on top wafer-level transfer bonding process. Using this approach, achieved voltage smaller achievable parallel-plate electrodes.
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