Surface micromachined leakage proof Parylene check valve

摘要: We report here a surface micromachined leakage proof Parylene MEMS check valve that has nearly ideal performance. This new unique design its membrane sealing ring directly deposited on, and hence in direct contact with, the gold-coated seat. The adhesion between gold is studied along with reduction of to seat when self-assembled monolayer (SAM) coatings are used on gold. Testing results clearly demonstrate effectiveness SAM coating. Experiments show valves have no observable reverse flow direction up 30 psi cracking pressure less than 1 forward direction. Integration this microchannels microfluidic system also demonstrated. shows in-channel performance under both flow.