laser annealing apparatus and laser annealing process
作者： Huan-Chao Wu , I-Chang Tsao , Wu-Hsiung Lin , Wen-Cheng Lin
DOI:
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摘要: A laser annealing apparatus is disclosed, which adapted for a process. The comprises laser-generating module, resistance-measuring and host circuit wherein the module provides beam to recrystallize an amorphous silicon thin film form polysilicon film. measuring sheet resistance of Besides, electrically coupled between module. outputs feedback signal in accordance with value. Then, energy density optimized. can improve quality film, increase yield rate
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