Development of Thermally Stable NiGe—based Ohmic Contacts to n-type GaAs
作者： Takeo Oku , Hirotaka R. Kawata , Akira Otsuki , Masanori Murakami
DOI: 10.1016/B978-0-444-81889-8.50034-1
关键词:
摘要: Contact resistances of NiGe Ohmic contacts were reduced by adding a small amount In or Au to the contacts. These had excellent thermal stability, smooth surface, and shallow diffusion depth. A model for current transport NiGe–based was proposed, which explained well dependencies contact on microstructure at GaAs/metal interface.
sci-hub.st 参考文章(8)
A. Lahav, M. Eizenberg, Y. Komem, Interfacial reactions between Ni films and GaAs Journal of Applied Physics. ,vol. 60, pp. 991- 1001 ,(1986) , 10.1063/1.337343
Kiwamu Tanahashi, H. J. Takata, A. Otuki, Masanori Murakami, Thermally stable non‐gold Ohmic contacts to n‐type GaAs. I. NiGe contact metal Journal of Applied Physics. ,vol. 72, pp. 4183- 4190 ,(1992) , 10.1063/1.352228
J. M. Woodall, J. L. Freeouf, G. D. Pettit, T. Jackson, P. Kirchner, Ohmic contacts to n‐GaAs using graded band gap layers of Ga1−xInxAs grown by molecular beam epitaxy Journal of Vacuum Science and Technology. ,vol. 19, pp. 626- 627 ,(1981) , 10.1116/1.571074
Yih‐Cheng Shih, Masanori Murakami, E. L. Wilkie, A. C. Callegari, Effects of interfacial microstructure on uniformity and thermal stability of AuNiGe ohmic contact to n-type GaAs Journal of Applied Physics. ,vol. 62, pp. 582- 590 ,(1987) , 10.1063/1.339860
J. R. Waldrop, R. W. Grant, Correlation of interface composition and barrier height for model AuGeNi contacts to GaAs Applied Physics Letters. ,vol. 50, pp. 250- 252 ,(1987) , 10.1063/1.98215
T. S. Kuan, P. E. Batson, T. N. Jackson, H. Rupprecht, E. L. Wilkie, Electron microscope studies of an alloyed Au/Ni/Au‐Ge ohmic contact to GaAs Journal of Applied Physics. ,vol. 54, pp. 6952- 6957 ,(1983) , 10.1063/1.332011
Masanori Murakami, Yih‐Cheng Shih, W. H. Price, E. L. Wilkie, K. D. Childs, C. C. Parks, Thermally stable ohmic contacts to n-type GaAs. III. GeInW and NiInW contact metals Journal of Applied Physics. ,vol. 64, pp. 1974- 1982 ,(1988) , 10.1063/1.341752
T. Sands, V. G. Keramidas, A. J. Yu, K-M. Yu, R. Gronsky, J. Washburn, Ni, Pd, and Pt on GaAs: A comparative study of interfacial structures, compositions, and reacted film morphologies Journal of Materials Research. ,vol. 2, pp. 262- 275 ,(1987) , 10.1557/JMR.1987.0262