Process for manufacture of integrated circuit device using a matrix comprising porous high temperature thermosets

作者: Craig Jon Hawker , Willi Volksen , Jeffrey Curtis Hedrick , Victor YeeWay Lee , Robert Dennis Miller

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摘要: The invention relates to a process for forming an integrated circuit device comprising (i) substrate; (ii) metallic lines positioned on the substrate and (iii) dielectric material lines. comprises porous organic polyarylene ether.

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