Design and optimization of thermally coupled distillation schemes for the trichlorosilane purification process

摘要: Abstract The trichlorosilane (TCS) purification process has significant energy requirements to achieve a TCS purity of 10 N. In this study, dividing wall column was used improve the performance process. A response surface methodology applied design column. conventional and top have benefits, e.g. decreasing operating cost minimizing total annual cost. Incorporating heat pump in diving columns also proposed enhance efficiency further. Furthermore, grand composite curve evaluate thermodynamic feasibility implementing system into DWC. could be reduced by 83% novel combinations internal external integration: using vapor recompression pump. compact integrating finally proposed.