Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal
作者： Hang Gao , Xu Wang , XiaoJi Teng , DongMing Guo
DOI: 10.1007/S11431-015-5866-4
关键词:
摘要: In this paper, a micro water dissolution machining (MWDM) principle is proposed for potassium dihydrogen phosphate (KDP) crystal using water-in-oil micro-emulsion as an abrasive-free polishing fluid. addition, two instances of the application to ultra-precision KDP crystals are presented. Computer-controlled optical surfacing (CCOS) and diamond wire cutting (DWC) process were carried out according MWDM principle. case CCOS technology, it found that micro-waviness was removed completely by following The surface undulation decreased from 40 nm less than 10 nm, root-mean-square (rms) roughness obviously reduced 8.147 2.660 nm. DWC process, rms 8.012 2.391 μm, efficiency improved. These results indicate can efficiently improve quality has great potential machine water-soluble materials.
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