作者: Wei Gao , Lili Wang , Lunfu Tian , Pengfei Sun , Hui Dong
DOI: 10.1364/OME.8.001012
关键词:
摘要: Traditional potassium dihydrogen phosphate (KDP) polishing methods, such as magnetorheological finishing (MRF), ion-beam figuring (IBF), and chemical mechanical …